New mechanism realizing high rigidity
and high precision in the lateral direction
Rigidity and precision is regarded as important in the XYq stage intended for alignment. Along with an increasing stage size, such trend has been more and more outstanding. New mechanism, a solution for this problem, has been commercialized as this product.
Compensating weak points of 3-axis type and adopting a unique algorithm have attained the control deemed to be difficult.
We have improved the supporting method adopted by most manufacturers, to realize such high rigidity and high precision as never achieved in the past.