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system integrating XYq stage and image processor
with dedicated controller has been completed.
Dedicated controller serves as the hub of this system,
controlling XYq stage and image processor
as well as responding to signals from host controller.
|Controls correction value measurements through table movements.
This system realizes alignment operation sequences for objects to be aligned, from measurement through table movement calculation and positioning.
|Interface with host controller
While this is a complete alignment system, it can also control such things as the start of calculation or operation according to instruction from a host controller.
|3-axis operation function
Based on XYq data obtained from image processor, it automatically calculates the feed and feed rate for 3-axis motor. In addition, the rotation center can be freely changed.
|Visual positioning with manual operation
Pulse handle key attached to dedicated controller allows fine feed in XYq directions. Alignment can be performed manually while checking camera images on the monitor.
|System configuration figure||Example of installation|
| Semiconductor production; survey instruments
LCD, PDP and EL panel production units and survey instruments
Printers for screen printing and printed boards
Microscopic stages and others
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